上海光源光束线石墨薄片材料的真空性能实验研究  

Outgassing Characteristics of Graphite Sheet in Shanghai Synchrotron Radiation Facility

作　　者：陈明[1] 刘俊男[1] 薛松[1] 

机构地区：[1]中国科学院上海应用物理研究所,上海201800

出　　处：《真空科学与技术学报》2013年第7期661-664,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：石墨薄片材料的出气率及放出气体成分是上海光源光束线真空系统优化的重要依据。因此,采用小孔流导法实验装置测试经不同清洗处理的石墨薄片的出气率,并且通过四极质谱计监测测试过程中放出气体的成分。结果表明,不同清洗处理对石墨薄片的出气率的影响不大,而烘烤是降低石墨薄片出气率的有效方法。石墨薄片出气率在未经烘烤时为10-8Pa.L.s-1.cm-2量级,在140℃经48 h烘烤后为10-10Pa.L.s-1.cm-2量级。石墨薄片的残余气体谱图分析表明,与延长排气时间相比,烘烤是抽除石墨薄片吸附的清洗剂的有效措施。The out-gassing and gas desorption characteristics of graphite sheet,used inside the vacuum system of beam-line of Shanghai Synchrotron Radiation Facility,were experimentally studied to optimize the cleaning conditions of the graphite sheet and reduce the base pressure.The out-gassing rate of the graphite sheet was measured based on orifice conductance technique,and the thermally desorbed gases were monitored and characterized with quadrupole mass spectroscopy.The impacts of the sample processing conditions on the out-gassing rate were evaluated.The results show that the out-gassing rate strongly depends on the baking temperature and time,but has little to do with the cleaning techniques.The out-gassing rate,increased from an initial level of 10-8 Pa·L·s-1 cm-2 at room temperature to 10-10 Pa·L·s-1 cm-2 after baking at 140℃ for 48 h.The mass spectrum of the residue gases indicate that when it comes to the removal of the detergent contamination,the baking temperature outperforms the baking time.

关 键 词：石墨薄片 真空性能 出气率 质谱分析 

分 类 号：TB741[一般工业技术—材料科学与工程]