圆形域干涉图中的相位解包裹  

Phase-unwrapping for interferograms with circle field

作　　者：李国栋[1] 韦春龙[2] 于瀛洁 程维明 陈明仪 

机构地区：[1]上海大学嘉定校区精密机械工程系,上海201800 [2]上海大学嘉定校区通信工程系,上海201800

出　　处：《光学精密工程》2000年第5期473-477,共5页Optics and Precision Engineering

摘　　要：相位解包裹问题是许多干涉术中存在的基本问题。运用 DCT方法的解包裹算法是十分有效、健壮的 ,然而仅适用于方形域条纹图处理。本文引入加权迭代方法将其有效地运用于常见的圆形域干涉图的处理。模拟结果表明 ,加权迭代法的计算精度可达 1 0 - 7rad,相对于普通的 DCT解包裹算法有非常大的提高。我们在自行研制的 DOP-2 0 0 0型数字光学轮廓仪上 ,运用相移干涉术对一多刻线样板进行了测量 ,实验结果进一步表明 ,本文的加权迭代法是一种非常有效和实用的方法。Phase-unwrapping is a basic problem in many interferometry. The phase unwrapping algorithm using DCT method is one of specially effective and robust ones. However, it is only suitable for rectangle fields. In this paper, it is effectively used for circle fields by introducing weighted and iterative methods. The computer simulation shows that the accuracy can reach to 10 -7 rad and important improvement is made. A sample of multiline is measured using phase-stepping interferometry in DOP-2000 digital optical profiler developed by us. Further experimental results indicate that the method is very effective and practical.

关 键 词：相位解包裹 加权迭代 干涉术 圆形域干涉图 

分 类 号：TH744.3[机械工程—光学工程] O438[机械工程—仪器科学与技术]