改良西门子法多晶硅生产工艺关键设备  

Critical Equipments of Polysilicon Production Technology With Modified Siemens Method

作　　者：郭丹[1] 王恩俊[1] 武锦涛[1] 王泽武[1] 银建中[1] 

机构地区：[1]大连理工大学化工机械学院,辽宁大连116024

出　　处：《当代化工》2013年第7期912-916,966,共6页Contemporary Chemical Industry

摘　　要：随着人们对太阳能资源的开发和深入研究,作为其原材料供给的多晶硅行业也得到迅猛发展。在对多晶硅生产工艺改进的同时,其生产设备也得到相应的改进和更新。就改良西门子法多晶硅生产过程中的不同工序和不同工艺的主要生产设备进行探讨,比较其优缺点,并介绍相应的改进方法以获得更优的生产效率。Along with development and further research of solar energy resources,the polysilicon industry as the supplier of the raw materials has gained rapid development.The polysilicon production process is continuously improved,at the same time the corresponding equipments get improvement and innovation.In this paper,main production equipments of different processes with modified siemens method were introduced,and their merits and demerits were also compared.At last,the improvements were put forward as to get higher efficiency.

关 键 词：太阳能级多晶硅 改良西门子法 生产设备 节能高效 

分 类 号：TQ127.2[化学工程—无机化工]