无束腰的磁浸没透镜系统的理论研究和数值模拟  

Theory and Numerical Modeling of Magnetic Immersed Lenses without Crossover

作　　者：程敏[1] 唐天同[1] 

机构地区：[1]西安交通大学电子与信息工程学院电子科学与技术系,西安710049

出　　处：《真空科学与技术》2000年第5期326-330,共5页Vacuum Science and Technology

基　　金：国家自然科学基金资助项目!(No .6 99710 19)

摘　　要：采用曲轴坐标系统 ,导出了磁浸没透镜的宽束曲光轴理论 ,研究了初始正则角动量矩不为零的无束腰磁透镜系统的电子光学性质 ;数值模拟出了能产生缩倍聚场分布的磁透镜结构 ,并计算了具有解析表达式的缩倍聚场的高斯成像性质 。A theory of wide beam curved optical axes for magnetic immersed lenses has been developed.The electronic optics properties of the magnetic lenses systems which involve nonzero initial canonical angular momentum and have no crossover were theoretically studied.The magnetic lenses structures with converging field distribution have been modelled and numerically simulated.As an example,Gaussian imaging of the converging field which can be described analytically was calculated.The results are consistent with that obtained by conventional ray tracing calculation.

关 键 词：磁浸没透镜 无束腰 曲光轴 芯片 曝光系统 

分 类 号：TN405.985[电子电信—微电子学与固体电子学]