多氟代季戊四芳醚的合成及其在低介电薄膜中的应用  

Synthesis and Applications of Tetrapolyfluoroaryl Ethers of Pentaerythritol in Lowering Interlayer Dielectric Constants

作　　者：周峥嵘[1] 丁宗彪[1] 王全瑞[1] 李峰[1] 陶凤岗[1] 徐伟[2] 夏燚 章壮健[2] 华中一[2] 

机构地区：[1]复旦大学化学系,上海200433 [2]复旦大学材料科学系,上海200433

出　　处：《有机化学》2000年第5期787-789,共3页Chinese Journal of Organic Chemistry

基　　金：教育部重点科技项目资助

摘　　要：合成了六个多氟代季成四芳醚类化合物,并且对部分化合物掺杂于SiO_2薄膜的介电性质进行了研究。当氟原子掺杂浓度(F/Si)为1％时,薄膜介电常数K值小于3。Six tetrapolyfluoroaryl ethers and thioether of pentaerythntol have been synthesized by reaction of phenyl-sulfonate ester of pentaerythritol with the corresponding phenols or thiophenol. Some products have been found to be amenable to lower greatly the value of dielectric constant K to below 3 when doped to SiO2 films.

关 键 词：多氟代季戊四芳醚 氟掺杂SiO2薄膜 合成 

分 类 号：O625.2[理学—有机化学]