适用于宽带光的闪耀光栅衍射强度分布规律研究  

Diffraction intensity distribution of varied line-space blazed grating for broadband source

作　　者：王东辉[1] 刘林[1] 李秉实[1] 包艳[1] 郑普超[1] 张兵[1] 张超[1] 

机构地区：[1]西安飞行自动控制研究所,陕西西安710065

出　　处：《应用光学》2013年第4期706-710,722,共6页Journal of Applied Optics

基　　金：总装基金(60700);中航工业创新基金(2009D61864)

摘　　要：变栅距光栅线位移传感器是一种新型波长编码位移传感器,为进一步提高传感器波长解调的精度和减小光源的体积,提出适用于全工作波段的恒定闪耀角变栅距光栅结构。首先采用经典光学的方法推导出变栅距闪耀光栅衍射强度分布公式,从理论上证明该光栅结构可实现在全工作波段提高变栅距光栅线位移传感器衍射光强。此外,制作出变栅距闪耀光栅样件证实了工艺可行性。在相同的条件下,对一组参数相同的闪耀光栅和矩形槽形光栅进行了衍射光强比对实验,得到变栅距闪耀光栅的衍射光强约为矩形变栅距光栅的衍射光强的1.7倍,并与按此衍射光强分布公式计算的结果一致。The varied line-space grating displacement sensor is a novel wavelength encoding displacement sensor,it is one of the vital components of developing fly by light（FBL） control technology.A varied line-space grating with high diffraction efficiency is necessary to enhance measurement precision and decrease the cubage of lamp-house.First,the calculation formula of diffraction intensity of the varied line-space blazed grating was deduced based on classical optical.It was theoretically improved that the varied line-space blazed grating could increase diffraction intensity of the sensor.In addition,the prototypes of the varied line-space blazed grating were fabricated and the feasibility of process was verified.Comparative experimental researching on diffraction intensity of varied line-space blazed grating and varied line-space rectangular grating was made at the same conditions.The experimental results show that the diffraction intensity of varied line-space blazed grating is 1.7 times than varied line-space rectangular grating which is consistent with the result of calculation formula of diffraction intensity.

关 键 词：线位移传感器 变栅距闪耀光栅 衍射强度 

分 类 号：TN20[电子电信—物理电子学] O436.1[机械工程—光学工程]