硬质合金表面化学脱钴对金刚石涂层的影响  

Effects of Cobalt-etched Surface Pretreatment of Cemented Carbide on Diamond Coatings

作　　者：邓福铭[1] 王强[1] 邹波[1] 张丹[1] 陆绍悌[1] 赵晓凯[1] 

机构地区：[1]中国矿业大学(北京)超硬刀具材料研究所,北京100083

出　　处：《硬质合金》2013年第3期113-121,共9页Cemented Carbides

基　　金：国家自然科学基金(No.51172278);科技人员服务企业行动计划项目(2009GJA00033);京市教委共建项目(2010-583)

摘　　要：以CH3COCH3和H2为反应气源,采用热丝CVD法在经过一步法和碱酸两步法预处理的YG6硬质合金(WC-6%Co)基体上沉积了金刚石涂层。采用扫描电镜、能谱仪、硬度计等对样品进行了分析检测,着重考察了一步法和两步法化学腐蚀脱钴预处理工艺对硬质合金基体表面形貌、钴含量以及其对所得金刚石涂层的形核密度、晶粒尺寸、膜基附着性能等的影响。实验结果表明:无论是一步法还是两步法脱钴预处理工艺,都能去除YG6硬质合金基体表面的钴元素,一步法最佳腐蚀时间为15 min,两步法最佳腐蚀时间为5 min,两步法效果强于一步法。在经两步法5 min酸蚀脱钴预处理的YG6基体上,获得了膜基粘着性能良好、结晶性能好的微米金刚石涂层。Diamond coatings were synthesized on the cemented carbide substrates of WC-6wt%Co pretreated by one- step and alkali/acid two-step processes in CH3COCH3/H2 ambient via hot filament chemical vapor deposition. The samples obtained were tested by means of SEM, EDS, hardness tester, etc. The effects of one-step and two-step pretreatment on the surface morphologies, cobalt content of WC-6wt%Co substrates as well as on the nucleation density, grain size, adhesion between films and WC-6wt%Co substrates of the diamond coatings were mainly investigated. The results show that： cobalt can be effectively removed from the surface of WC-6wt%Co substrates whatever adopting one-step or two-step pretreatment, the best acid etching time is about 15 min in one-step acid pretreatmerit as which is 5 min in two-step pretreatment, the effect of two-step pretreatment is better than that of the one-step pretreatment. Diamond coatings with good adhesion property and crystallization quality were deposited on WC-6wt%Co substrates pretreated by two-step method.

关 键 词：化学气相沉积(CVD) 金刚石涂层 硬质合金 表面预处理 附着性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理]