电容式硅微传声器设计及其移动通信中的应用  

Design of Capacitive Silicon Microphone and Its Application in Mobile Phone

作　　者：孙长城 马治国 

机构地区：[1]深圳电信研究院,广东深圳518048

出　　处：《电声技术》2013年第7期18-21,共4页Audio Engineering

摘　　要：介绍了电容式硅微传声器的构造和工作原理,采用电-力-声类比法,建立了通用电容式硅微传声器的集总参数等效电路模型,并运用PSPICE软件对其动态特性进行计算机仿真,得到了仿真模型在1 kHz处的灵敏度达到-40 dB,并且在可听域范围内,频率响应平坦。Structure and working principal of a capacitive silicon microphone are proposed. A lumped-parameter equivalent circuit model for general capacitive silicon microphone is built up by the analogy of electricity-mechanics-acoustics, and its dynamic characteristics are simulated by using PSPICE which is an emulation software of circuit, the result gets the sensitivity of - 40 dB at 1 kHz, and under the threshold of hearing frequency gets a flat frequency response.

关 键 词：电容式硅微硅传声器 电-力-声类比 仿真 

分 类 号：TN641[电子电信—电路与系统]