阵列碳纳米管薄膜厚度调控研究  

Regulation on the thickness of aligned carbon nanotube arrays

作　　者：马康夫[1,2] 付志兵[2] 杨曦[2] 王朝阳[2] 唐永建[2] 

机构地区：[1]西南科技大学材料科学与工程学院,四川绵阳621010 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《功能材料》2013年第15期2162-2165,2169,共5页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(11075143/A050609);等离子体物理重点实验室资助项目(9140C680502110C6807);四川省非金属复合与功能材料重点实验室-省部共建国家重点实验室培育基地开放基金资助项目(10zxfk34)

摘　　要：采用化学气相沉积法制备了阵列碳纳米管薄膜,对薄膜生长厚度进行了系统研究。利用扫描电子显微镜(SEM)、拉曼光谱(Raman)对样品形貌以及结构进行了表征。结果发现,在相同的生长时间和一定的催化剂浓度范围内,阵列碳纳米管的薄膜厚度随催化剂浓度提高而增加;在生长时间相同时,阵列碳纳米管薄膜厚度随载气流速的增加而降低,且下降趋势近似为线性;随着生长时间的增长,阵列碳纳米管薄膜的厚度也随之增加,且在前60min生长速度最快达到24μm/min,60min之后生长速度减缓。Aligned carbon nanotube arrays（ACNTs） have been prepared by chemical vapor deposition（CVD）.The growth thickness of ACNTs has been investigated systematically.The morphology and structure of samples were characterized by scanning electron microscopy（SEM） and Raman spectroscopy.The results indicated that at the same growth time and for a certain rang of concentration of catalyst,the thickness of ACNTs increased with the improving concentration of catalyst.The thickness of ACNTs decreased with the increasing flowing rate of carrier gas,and the trend of the decline of ACNTs was nearly linear.The thickness of ACNTs increased with the growth time prolonging and the growth rate increased to 24μm/min in the initial 60min and slowed down after 60min.

关 键 词：阵列碳纳米管 厚度 生长速度 

分 类 号：TQ177[化学工程—硅酸盐工业]