石英玻璃抛光表面层性质探索  

The surface of fused silica manufactured by different polishing techniques

作　　者：李娜[1] 蒋威[1] 李亚国[2] 

机构地区：[1]河南工程学院,郑州451191 [2]成都精密光学工程研究中心,成都610041

出　　处：《激光杂志》2013年第4期38-39,共2页Laser Journal

摘　　要：对采用传统沥青和聚氨酯抛光技术以及磁流变加工技术所加工的石英玻璃元件表面进行了实验。实验发现,传统抛光所加工石英元件表面层硬度大于磁流变(MRF)加工的表面层,其可能为传统加工与MRF不同的加工机理所导致。传统加工中材料的去除主要靠抛光粉颗粒与玻璃表面的正压力作用,其微观压强很高,足以引起石英的硬化或致密化。而MRF主要是剪切力引起材料去除,正压力很小,不能够达到引起石英致密化所需要的压强。抛光过程中,会同时发生机械作用的致密化和化学作用的离子交换,最终的表面性质由机械和化学作用同时决定。在MRF加工中,由于使用剪切力去除材料,因此机械致密化作用较弱,而化学作用较强,导致石英表面变小,折射率下降;而传统加工中机械作用较强,因此引起石英玻璃表面硬化,折射率增大。The surfac, e of fused silica manufactured by trachtional pitch/pad polishing and magneto rheological finishing（MRF） was investigated,respectively. It is found that the surface polished by MRF was softer than that manufactured by traditional polishing. The reason may he due to the different mechanisms of two polishing proeesses. It is the positive pressure that causes the naterial removal in traditional pilch/pad polishing, which is sufficient to induce the densificationof fumed silica. However, the material is removed by tangential force in MRF in MRF the positivepressure is quite trivial and unlikely to densify the surface of fusad silica, Leaching and densificatian concur in polishing processes and the properties of finished surface are quite inated by the synergyof leaching and densification; the leaching can decease the refractive index of surface layer as well as the hardness while the densification adds to refractive index and surface hardness. In MRF, the leaching is the major effect that will soften the surface hardness. In contrast, the densifieation is predominant in pitch/pad polishing processes and therefore the surface hardness will increase.

关 键 词：磁流变 传统抛光 石英玻璃 表面特性 

分 类 号：TQ171[化学工程—玻璃工业]