窄带FBAR带通滤波器设计  

Design of a Narrow Band FBAR Band-Pass Filter

作　　者：周斌[1,2] 高杨[2] 何移[1] 李君儒[1] 何婉婧[1] 

机构地区：[1]西南科技大学信息工程学院,四川绵阳621010 [2]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《微纳电子技术》2013年第8期487-493,共7页Micronanoelectronic Technology

基　　金：中国工程物理研究院超精密加工技术重点实验室基金资助项目(2012CJMZZ00009);西南科技大学制造过程测试技术省部共建教育部重点实验室开放课题资助项目(11ZXZK03);西南科技大学研究生创新基金资助项目(13ycjj31;13ycjj36)

摘　　要：由薄膜体声波谐振器构成的滤波器,其带宽受压电材料机电耦合系数的影响,较难实现窄带滤波器设计。使用ADS射频仿真软件设计了一种通带为1.18～1.20 GHz的窄带薄膜体声波滤波器,分别通过比较增加无源电容元件、改变串并联谐振器面积比、在压电振荡堆内增加一层非压电层和采用两个中心频率不同的薄膜体声波滤波器串联这四种方法,得出窄带薄膜体声波滤波器的优化设计方案。设计得到的滤波器突破了压电材料本身机电耦合系数限定的带宽值,实现了窄带要求,并且带外抑制以及带内插损等设计指标均满足要求。The bandwidth of the filter based on the film bulk acoustic resonators （FBARs） is influenced by the electromechanical coupling coefficient of the piezoelectric material, so it is difficult to realize the design of a narrow-bandwidth filter. A narrow-bandwidth filter with the pass band of 1.18 - 1.20 GHz was designed by ADS software. By comparing four methods, adding passive capacitive elements, changing the resonance area ratio of series-parallel resonators, adding a non-piezoelectric layer in the piezoelectric stack and cascading two FBARs with different center frequencies, an optimum design of the narrow-bandwidth FBAR filter was obtained. The designed filter breaks through the limited bandwidth caused by the electromechanical coupling coefficient of the piezoelectric material to achieve the requirements of narrow-bandwidth, and the out-of-band suppression and insertion loss meet the requirements of design indexes.

关 键 词：薄膜体声波谐振器(FBAR) 窄带滤波器 机电耦合系数 带宽 压电材料 先进设计系统(ADS) 

分 类 号：TN713[电子电信—电路与系统]