高精度激光加工设备隔振系统的设计  

Design of the Isolation System of the High-precision Laser Processing Equipment

作　　者：貊泽强[1,2] 余锦[1] 聂树贞[1] 刘洋[1,2] 葛文琦[1] 张雪[1] 郭广妍[1,2] 王治昊[1,2] 王昊成[1,2] 

机构地区：[1]中国科学院光电研究院,北京100094 [2]中国科学院研究生院,北京100190

出　　处：《科学技术与工程》2013年第21期6082-6087,共6页Science Technology and Engineering

摘　　要：随着激光加工精度要求的不断提高,加工设备系统的稳定性问题受到越来越多的重视。利用有限元方法对高精度激光加工设备的固有频率和谐响应进行了分析,并采用空气弹簧对整个系统进行减振处理。研究结果表明该激光加工设备具有较高的固有频率,当外部激励频率明显小于一阶固有频率时系统较稳定,并且不同振动频率下空气弹簧的减振效果均较高,满足设备的减振要求。With the continuous improvement of the accuracy requirements of the laser processing,the stability of the processing equipment are more and more attention.The finite element method is used to analysis the natural frequency and harmonic analysis for high-precision laser processing equipment,and using the air spring to vibration damping for the entire system.The study results showed that the laser processing equipment having a higher natural frequency,the system is more stable when the external excitation frequency is significantly smaller than the first natural frequency,and the damping effect of the air spring under different vibration frequencies are very well,and meet the damping requirements.

关 键 词：激光微加工 结构设计 振动分析 空气弹簧 

分 类 号：TH113.1[机械工程—机械设计及理论]