基于PC平台的高精度激光微加工系统的研制  

High-precision Laser Micromachining System Based on PC

作　　者：貊泽强[1,2] 余锦[1] 樊仲维[1] 刘洋[1,2] 葛文琦[1] 张雪[1] 聂树真[1] 郭广妍[1,2] 王治昊[1,2] 王昊成[1,2] 

机构地区：[1]中国科学院光电研究院,北京100094 [2]中国科学院研究生院,北京100190

出　　处：《科学技术与工程》2013年第21期6229-6234,共6页Science Technology and Engineering

摘　　要：介绍了自主设计高精度皮秒激光微加工系统及其控制单元。首先在加工系统整体方案的设计上充分考虑了激光器的选择、光束质量、控制方式等对加工精度的影响。将高斯光束转化为平顶光束引入激光微加工。其次使用了一种位置比较脉冲的光机同步技术,使得激光脉冲在空间上均匀分布,改善了加工效果。最后在系统中加入了路径规划、实时监测及同步显示等功能,实现系统加工线宽达到3.64μm,绝对定位精度小于1μm的激光微加工。The independent design of high-precision picosecond laser micromachining system and its control unit is presented,First in the design of the overall program,the impact of choice of the laser,the beam quality,control methods ware fully considerd for machining accuracy.Secondly using the Light machine synchronization technology which was called position compare output,laser pulse is spatially uniform distribution,improving the processing effect.In addition,path planning,the real-time monitoring and simultaneous display functions is added to system,ultimately the system processing linewidth control is 3.64 micron and absolute positioning accuracy is smaller than 1 micron.

关 键 词：激光微细加工 控制系统 光束整形 光机同步 

分 类 号：TG665[金属学及工艺—金属切削加工及机床] TP272[自动化与计算机技术—检测技术与自动化装置]