空气轴承径向回转误差测量精度建模与仿真  

Modeling and Simulation of Precision in Rotating Error Measurement of Air-bearing

作　　者：凌明祥[1] 李明海[1] 王珏[1] 张荣[1] 黎启胜[1] 

机构地区：[1]中国工程物理研究院总体工程研究所,四川绵阳621900

出　　处：《计算机测量与控制》2013年第8期2068-2070,2073,共4页Computer Measurement &Control

基　　金：国家重大科学仪器专项(2011YQ130047)

摘　　要：针对空气轴承回转误差的测量精度问题,基于三点法误差分离原理,建立了空气轴承回转误差测量系统中存在的各种测量误差传递数学模型;以测量误差传递函数作为目标函数,对传感器夹角布置进行了仿真优化;基于优化结果,模拟计算了传递到回转误差上的传感器读数随机误差、系统误差以及测头角位置误差大小;计算结果表明,选择适当的传感器夹角,可将传感器读数中的测量误差传递倍数控制在1.13左右,而测头角位置误差传递量可忽略;建立的测量误差传递模型及仿真计算结果可为相关主轴回转误差的测量精度评估提供一定参考。To the issue of accuracy of rotating error measurement with three--points method, three kinds of measuring error transferring models in the process of rotating error measurement were built based on error separation principle of three--points method. The angle posi- tion of three sensors was simulated and optimized by employing measuring error transferring function. Based on calculation results, random and system error of sensore output values as well as angle position error of sensor transferred on rotating error were calculated and simulated. The results showed that, when choosing an appropriate sensor angle value, measuring error of sensor output value transferred on rotating er- ror can he controlled within 1.13 times, and angle position error of sensor transferred on rotating error can be neglected. Our proposed meas- uring error transferring models and calculation results can provide a reference for accuracy assess of rotating error measurement.

关 键 词：空气轴承 回转误差 三点法 误差传递 

分 类 号：TH7[机械工程—仪器科学与技术]