长光栅传感器动态特性试验台的设计  

Design of dynamic performance detector system for linear grating sensor

作　　者：王敏[1] 王笑一[1] 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100124

出　　处：《机电工程》2013年第5期549-551,561,共4页Journal of Mechanical & Electrical Engineering

基　　金：北京市科技计划资助项目(Z121100001612009)

摘　　要：针对目前长光栅动态特性试验缺乏必要手段的问题,采用比对测量原理,以激光干涉仪为基准,提出了一种长光栅动态特性检测和可靠性试验方案,通过实验法研究了速度与加速度对长光栅测量精度的影响;基于精密气浮导轨、激光干涉仪和数控技术,研制出了长光栅动态特性试验系统。该试验台采用卧式结构,主要由机械系统、伺服系统、数据采集处理系统和软件系统组成,具有精度检测、动态性能测试和寿命试验的功能。精度分析结果表明:该试验系统的综合不确定度为0.124μm,即满足试验台对精度为0.5μm的光栅进行检测的精度要求。Aiming at the problem of lacking the necessary means for linear grating dynamic characteristics test,currently,comparison measurement principle was adopted,laser interferometer was used as measurement reference,a linear grating dynamic characteristics detection and reliability test program was proposed,the influence of speed and acceleration to linear grating measurement accuracy was studied through experimental method.Based on precision aerostatic guideway,laser interferometer and CNC technology,a linear grating dynamic characteristics test system was developed.The test bench adopted horizontal structure,mainly composed of mechanical system,servo system,data acquisition and processing system,and software system,with precision testing,dynamic performance testing and life testing function.The results of accuracy analysis indicate that,the uncertainty of the test system is 0.124 μm,and that meets the accuracy requirements for detecting linear grating with accuracy of 0.5 μm.

关 键 词：光栅传感器 动态特性 试验系统 气浮导轨 

分 类 号：TH74[机械工程—光学工程] TP212.1[机械工程—仪器科学与技术]