基于FIB/SEM切片和TEM/EELS技术分析Au/Ag泡沫材料的微观结构  

Nano-characterization of Foamed Au/Ag Structures by FIB/SEM-Slice and TEM/EELS Techniques

作　　者：张继成[1] 谭秀兰[1] 周民杰[1] 韩尚君[1] 李佳[1] 罗江山[1] 吴卫东[1] 唐永建[1] 

机构地区：[1]中国工程物理研究院,四川绵阳621900

出　　处：《稀有金属材料与工程》2013年第8期1664-1668,共5页Rare Metal Materials and Engineering

基　　金：国家自然科学基金(60908023);四川省非金属复合与功能材料重点实验室开放基金(11zxfk19)

摘　　要：利用FIB/SEM切片、XRD、TEM和EDX、EELS等先进分析技术对微球模板法所制备的Au/Ag泡沫材料的微观结构、形貌、成分及成分分布等进行了细致的研究。结果表明:由微球状Au/Ag球壳堆积而成的泡沫材料中微球直径约8 m,微球壁厚200～1200 nm;Au/Ag泡沫材料的球壳可细分为3层,内层和外层为Au/Ag合金的微粒,中间主要是非晶碳层,夹杂有少量的Au/Ag微粒;Au/Ag泡沫材料的骨架由单个空心球壳组成,球壳之间通过接触点的金属镀层连接在一起;球壳上有小孔状结构,是在热分解法去除聚苯乙烯微球模板时形成的;球壳壁厚分布不均匀,少数球壳有塌陷、变形、破裂等现象。这些详细的分析有助于改进工艺,提高Au/Ag泡沫材料的制备质量。The foamed gold/silver, synthesized by seed-mediated growth with polystyrene （PS） template, casting procedure and heat treatment, was characterized by Focused Ion Beam/Scanning Electron Microscopy （FIB/SEM） series slices and Transmission Electron Microscopy/Electron Energy Loss Spectroscopy （TEM/EELS） techniques. The results indicate that the foamed Au/Ag with hollow spheres of 8 ~10 ~tm, deposited gold/silver of 200-1200 nm thickness, grain size of 30-60 nm are observed through FIB slices. The self-supported spheres of foamed Au/Ag contain three layers, Au/Ag alloy layer, carbon layer and Au/Ag alloy layer. Carbon layer, which is unexpected, may be formed during heat treating procedure for PS template removed. The network of foamed Au/Ag is built up with hollow spheres and the hollow spheres are interconnected by contact point, a few of which distort, crack, and break down during the fabrication process. This work is greatly helpful to understand the inner 3D microstructure and improve the fabrication processes of Au/Ag foams.

关 键 词：AuAg泡沫材料 微结构表征 TEM EELS FIB SEM断层成像 

分 类 号：TB383.4[一般工业技术—材料科学与工程]