阳极氧化参数对TiO_2薄膜结晶行为影响的研究进展  

Effect of anodic oxidation parameters on crystallization behavior of TiO_2 films

作　　者：邢俊恒[1] 夏正斌[1] 张燕红[1] 钟理[1] 

机构地区：[1]华南理工大学化学与化工学院,广东广州510640

出　　处：《化工进展》2013年第3期592-598,共7页Chemical Industry and Engineering Progress

基　　金：国家自然科学基金项目(20976058)

摘　　要：阳极氧化技术制备的功能性TiO2薄膜材料因其良好的耐腐蚀性、光催化活性及生物相容性,被广泛应用于腐蚀防护、光催化、太阳能电池及生物工程等领域。钛表面阳极氧化膜的应用性能与其结构密切相关,相较于无定形结构的TiO2,结晶的TiO2具有更高的光催化活性和更好的生物相容性。本文综述了氧化电位、电解液、氧化方式及时间等阳极氧化参数对钛表面氧化物薄膜结晶行为的影响,并分别讨论了各种因素对TiO2结晶的影响机理。在钛阳极氧化过程中,氧化电位的增加、温度的升高、氧化时间的延长以及电解液浓度的增加都有利于TiO2薄膜的结晶,而杂质离子的侵入及氧化膜生长速率的提高则不利于钛氧化物的结晶。Anodic oxide films on titanium formed by electrochemical methods have been widely applied in various areas, such as corrosion protections, photocatalytic engineering, solar cells, sensors and biomedical engineering due to their high corrosion resistance, good biomedical compatibility and photocatalytic activity. The performance of TiO2 films strongly depend on the structure, and crystalline TiO2 had better applicable properties than the amorphous form. In this paper, the effect of anodic oxidation parameters, such as potential, electrolyte （type, concentration and temperature）, Ti substrate, film growth mode and film growth rate on the crystallization behavior of TiO2 films were discussed. It was revealed that raising oxidation potential, increasing solution temperature, prolonging anodizing time and increasing concentration of electrolyte were beneficial to the formation of crystalline titanium oxides on the anode, while crystallization was suppressed by incorporation of impurity ions （electrolyte anions or alloying elements） or increasing film growth rate.

关 键 词：TIO2薄膜 结晶 阳极氧化参数 染料敏化太阳能电池 

分 类 号：O646[理学—物理化学] TQ153.6[理学—化学]