氢化炉C-C发热体使用寿命的研究  

Research of the Service Life of Hydrogenated C-C Heating Furnace

作　　者：白梅 苏明 

机构地区：[1]宁夏阳光硅业有限公司,宁夏石嘴山753202 [2]宁夏工业学院,宁夏银川750021

出　　处：《广州化工》2013年第16期113-114,131,共3页GuangZhou Chemical Industry

摘　　要：在多晶硅生产氢化工序中,在相同的工况下,对德国MSA公司C-C复合发热体和国内生产的C-C复合发热体的使用现象、寿命等方面的对比,总结出了影响氢化炉中C-C复合加热体使用寿命的主要因素,经实践验证国产C-C复合发热体完全可以满足多晶硅生产的使用要求。The German C-C complex MSA＇s domestic production of heat and heat using C-C complex phenomena,life and other aspects in the hydrogenation step,production of polysilicon in the same conditions were compared.The main factors affecting hydrogenation furnace C-C composite heating element life were summed up,and the domestic C-C composite heating element fully met the requirements for using in the production of polysilicon that was proved.

关 键 词：C-C复合材料 电极 使用寿命 

分 类 号：TQ12[化学工程—无机化工]