基于PWM控制方式的射频离子源送气系统设计  

Gas Supply System of RF Ion Source Based on PWM Control Mode

作　　者：卜英南[1] 雷光玖[1] 张贤明[1] 李明[1] 

机构地区：[1]核工业西南物理研究院聚变科学所,四川成都610041

出　　处：《测控技术》2013年第8期87-90,共4页Measurement & Control Technology

摘　　要：针对射频离子源实验对放电室气压精确控制的要求,提出了基于PWM控制方式的送气系统设计方案。结合真空系统的数学方程,利用Matlab-Simulink工具对PWM控制方式的送气过程进行仿真和分析,验证该控制方式的可行性。该送气系统以数字信号控制器为核心控制单元,采用前馈补偿和气压反馈PID控制策略,通过调节PWM占空比控制送气流量,以实现对离子源放电室气压的有效控制。实验结果显示了PWM控制方式能够对气压进行精确控制,基于该控制方式的送气系统能够满足射频离子源放电实验要求。For the accurate control of the gas pressure in the discharge chamber of RF（radio frequency） ion source,a gas supply system based on PWM control mode is proposed.According to the mathematical equation of vacuum system,the gas supply process of PWM control mode is simulated by Matlab-Simulink tool to verify the feasibility of the control mode.The control unit in the system is a digital signal controller,the feedforward compensation and gas pressure feedback PID control are adopted.By regulating PWM duty cycle to control gas flow rate,the gas pressure in the discharge chamber is effectively controlled.Experimental results show that PWM control mode is able to precisely control the gas pressure of the discharge chamber,the gas supply system meets the requirements of RF ion source discharge experiments.

关 键 词：气压控制 射频离子源 PWM控制方式 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]