A Compact Low Energy Electron Microscope for Surface Analysis  

适用于表面分析的小型低能电子显微镜

作　　者：张冠华[1] 孙巨龙[1] 金艳玲[1] 臧侃[2] 郭方准[2] 杨学明[1] 

机构地区：[1]中国科学院大连化学物理研究所,大连116023 [2]大连交通大学,大连116028

出　　处：《Chinese Journal of Chemical Physics》2013年第4期369-373,J0001,共6页化学物理学报（英文）

摘　　要：The description and function characterization of a flange-on type low energy electron mi- croscope are given. In this microscope a magnetic beam separator with 10° deflection angle is used in order to facilitate compacting the instrument on a single 10 in. flange. Mean- while some correcting elements in the electron optical system are simplified to reduce the complexities of construction and operation. The sample is set close to ground potential, so that all the electrostatic lenses are easily to float at high voltages. The performance of the microscope in typical low energy electron microscopy, low energy electron diffraction and photoemission electron microscopy modes is demonstrated through several experiments. A lateral resolution of 51 nm is estimated for low energy electron microscopy imaging. With femtosecond laser as light source, the consequent nonlinear photoemission makes this micro-scope also suitable for the observation of optical near field phenomena and a lateral resolution of 110 nm is obtained.

关 键 词：Low energy electron microscopy Flange-on Femtosecond laser Lateral reso-lution Small deflection angle 

分 类 号：O[理学]