光反馈自混合干涉式微位移传感器  

Optical Feedback Self-mixing Interferometry for MicroDisplacement Measurement

作　　者：郭常盈[1] 胡念英[1] 

机构地区：[1]南阳理工学院计算机科学与技术系,河南南阳473004

出　　处：《仪表技术与传感器》2013年第7期17-19,28,共4页Instrument Technique and Sensor

摘　　要：为了提高位移测量的精确度,提出了一种基于光反馈自混合干涉技术的位移测量方法。采用梯度最优算法分析和处理自混合干涉信号,达到数据理论的最佳拟合,实现微位移的精密测量,并通过设计算法对外部物体的运动轨迹进行重构。提出的传感器可用于亚微米级位移的测量和控制,并给出了PZT位移的实验结果。For improving displacement measurement accuracy, a new method based on optical feedback self - mixing interfer- ometry was proposed. This paper aimed to employ this technology to perform precision displacement measurement, analyzing and processing the self-mixing interference signal by the gradient-based optimization algorithm to achieve best data - theoretical fitting. In addition, the vibration trace of the target could be reconstructed with high accuracy. The proposed 10 sensor can be used in the sub-micron displacement of measurement and control, and the experiment result of displacement measurement of bimorph PZT was presented.

关 键 词：位移测量 半导体激光器 光反馈自混合干涉 梯度最优算法 

分 类 号：TH247[机械工程—机械制造及自动化]