光谱拟合法确定一种钙钛矿结构薄膜材料的复数光学常数  

Optical Constant of Perovskite-Structured Film Determined by Data-Fitting of Its Reflectivity Spectrum

作　　者：吴春华[1] 邱家稳[2] 许旻[1] 张佰森[1] 王洁冰[1] 李林[1] 赵印中[1] 左华平[1] 

机构地区：[1]兰州空间技术物理研究所表面工程技术重点实验室,兰州730000 [2]中国空间技术研究院总体部,北京100094

出　　处：《真空科学与技术学报》2013年第8期783-786,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：为了获得一种钙钛矿结构镧锶锰氧La0.8Sr0.2MnO3薄膜材料的复数光学常数,利用光学薄膜原理和数学优化方法,并基于钙钛矿结构材料的色散模型,对磁控溅射技术制备的不同厚度的镧锶锰氧薄膜在波数400~1250 cm-1范围内的反射光谱进行了全谱拟合,并由拟合参数确定了薄膜的复数光学常数。拟合结果显示,测试光谱和拟合光谱较为一致,说明钙钛矿结构材料的色散模型适用于描述La.08Sr0.2MnO3薄膜的光学特性,利用该色散模型并通过光谱拟合法获得La.08Sr0.2MnO3薄膜的复数光学常数是获得此材料光学特性的一种有效的方法。The complex optical constants of the perovskite-phased La0.8Sr0.2MnO3 films,deposited by magnetron sputtering,were evaluated based on the well-accepted theories of optical films and conventional data processing algorithms.The reflectivity spectrum of the La0.8Sr0.2MnO3 films with different thickness was fitted,on the basis of the dispersion mode in the wave number range from 400 cm-1 to 1250 cm-1;and then the complex optical constants were derived in terms of the results calculated by data fitting.The calculated reflectivity spectrum of the perovskite-phased La0.8Sr0.2MnO3 thin films was found to agree fairly well with the measured one.This suggest that the dispersion mode and data fitting be capable of characterizing the reflectivity spectrum and complex optical constants of the La0.8Sr0.2MnO3 thin films.

关 键 词：薄膜 光学常数 光谱拟合 镧锶锰氧 

分 类 号：O484.4[理学—固体物理]