The Efect of the Earthed Electrode Size on the Ignition Voltage of Low-Pressure RF Capacitive Discharge in Argon  

作　　者：A. A. AZOOZ M. A. AHMAD 

机构地区：[1]Department of Physics,College of Science,Mosul University [2]Department of Physics,College of Education,Mosul University

出　　处：《Plasma Science and Technology》2013年第9期881-884,共4页等离子体科学和技术（英文版）

摘　　要：The effect of the grounded electrode diameter on the ignition voltage using 13.56 MHz in argon gas is studied experimentMly. The results indicate a systematic decrease of the breakdown voltage with increasing electrode area for the same pd value. No multi-valued breakdown voltages are observed. The Paschen minimum is not affected by the electrode diameter as long as the parallel plane approximation is valid. A modified Paschen equation which takes into account indirect discharge via the chamber walls at high pd values gives reasonable fits to the experimental data.The effect of the grounded electrode diameter on the ignition voltage using 13.56 MHz in argon gas is studied experimentMly. The results indicate a systematic decrease of the breakdown voltage with increasing electrode area for the same pd value. No multi-valued breakdown voltages are observed. The Paschen minimum is not affected by the electrode diameter as long as the parallel plane approximation is valid. A modified Paschen equation which takes into account indirect discharge via the chamber walls at high pd values gives reasonable fits to the experimental data.

关 键 词：CCRF electrode size Paschen law RF plasma 

分 类 号：O441[理学—电磁学]