Decomposition of Nitrogen Trifluoride Using Low Power Arc Plasma  

作　　者：Jee-Hun KO Sooseok CHOI Hyun-Woo PARK Dong-Wha PARK 

机构地区：[1]Department of Chemical Engineering and Regional Innovation Center for Environmental Technology of Thermal Plasma,(RIC-ETTP),INHA University,253 Yonghyun-dong,Nam-gu,Incheon 402-751,Republic of Korea [2]Department of Environmental Chemistry and Engineering,Tokyo Institute of Technology 4259-G1-22,Nagatsuta-cho,Midori-ku,Yokohama 226-8502,Japan

出　　处：《Plasma Science and Technology》2013年第9期923-927,共5页等离子体科学和技术（英文版）

基　　金：supported by the Regional Innovation Center for Environmental Technology of ThermalPlasma(ETTP)at Inha University designated by MKE(2012)with funding received from the KORANET JointCall on Green Technologies

摘　　要：The low power arc plasma is characterized by extremely high enthalpy and temper- ature and it is easy to generate and control, and thus thermal decomposition process based on the plasma torch is receiving a great attention for decomposing non-degradable greenhouse gases. In order to elevate the economic feasibility, the effects of input power, waste gas flow rate and additive gases on the destruction and removal efficiency （DRE） of NF3 are examined. Specific energy density （SED） deceases as the flow rate increases, and accordingly, the DRE is reduced. The DRE is basically determined by the specific energy density. The highest DRE of NF3 was 97% for the waste gas flow rate of 100 L/min at a low input power level of 2 kW with the help of hydrogen additional gas. The inlet and outlet concentration of NF3 was analyzed using Fourier transform infrared spectroscopy （FT-IR） for DRE of NF3 evaluation. As a result, large amount of NF3 can be efficiently decomposed by low power arc plasma systems.The low power arc plasma is characterized by extremely high enthalpy and temper- ature and it is easy to generate and control, and thus thermal decomposition process based on the plasma torch is receiving a great attention for decomposing non-degradable greenhouse gases. In order to elevate the economic feasibility, the effects of input power, waste gas flow rate and additive gases on the destruction and removal efficiency （DRE） of NF3 are examined. Specific energy density （SED） deceases as the flow rate increases, and accordingly, the DRE is reduced. The DRE is basically determined by the specific energy density. The highest DRE of NF3 was 97% for the waste gas flow rate of 100 L/min at a low input power level of 2 kW with the help of hydrogen additional gas. The inlet and outlet concentration of NF3 was analyzed using Fourier transform infrared spectroscopy （FT-IR） for DRE of NF3 evaluation. As a result, large amount of NF3 can be efficiently decomposed by low power arc plasma systems.

关 键 词：arc plasma DECOMPOSITION nitrogen trifluoride 

分 类 号：O53[理学—等离子体物理]