The influence of RF power on the electrical properties of sputtered amorphous InGa-Zn-O thin films and devices  

作　　者：施俊斐 董承远 戴文君 吴杰 陈宇霆 詹润泽 

机构地区：[1]Center for Opto-Electronic Materials and Devices,National Engineering Laboratory for TFT-LCD Materials and Technologies,Shanghai Jiao Tong University [2]Infovision Optoelectronics(Kunshan) Co.,Ltd

出　　处：《Journal of Semiconductors》2013年第8期56-60,共5页半导体学报（英文版）

基　　金：supported by the State Key Development Program for Basic Research of China(No.2013CB328803);the National Natural Science Foundation of China(No.61136004)

摘　　要：The influence of radio frequency（RF） power on the properties of magnetron sputtered amorphous indium gallium zinc oxide（a-IGZO） thin films and the related thin-film transistor（TFT） devices is investigated comprehensively.A series of a-IGZO thin films prepared with magnetron sputtering at various RF powers are examined.The results prove that the deposition rate sensitively depends on RF power.In addition,the carrier concentration increases from 0.91 x 1019 to 2.15 x 1019 cm-3 with the RF power rising from 40 to 80 W,which may account for the corresponding decrease in the resistivity of the a-IGZO thin films.No evident impacts of RF power are observed on the surface roughness,crystalline nature and stoichiometry of the a-IGZO samples.On the other hand,optical transmittance is apparently influenced by RF power where the extracted optical band-gap value increases from 3.48 to 3.56 eV with RF power varying from 40 to 80 W,as is supposed to result from the carrierinduced band-filling effect.The rise in RF power can also affect the performance of a-IGZO TFTs,in particular by increasing the field-effect mobility clearly,which is assumed to be due to the alteration of the extended states in a-IGZO thin films.The influence of radio frequency（RF） power on the properties of magnetron sputtered amorphous indium gallium zinc oxide（a-IGZO） thin films and the related thin-film transistor（TFT） devices is investigated comprehensively.A series of a-IGZO thin films prepared with magnetron sputtering at various RF powers are examined.The results prove that the deposition rate sensitively depends on RF power.In addition,the carrier concentration increases from 0.91 x 1019 to 2.15 x 1019 cm-3 with the RF power rising from 40 to 80 W,which may account for the corresponding decrease in the resistivity of the a-IGZO thin films.No evident impacts of RF power are observed on the surface roughness,crystalline nature and stoichiometry of the a-IGZO samples.On the other hand,optical transmittance is apparently influenced by RF power where the extracted optical band-gap value increases from 3.48 to 3.56 eV with RF power varying from 40 to 80 W,as is supposed to result from the carrierinduced band-filling effect.The rise in RF power can also affect the performance of a-IGZO TFTs,in particular by increasing the field-effect mobility clearly,which is assumed to be due to the alteration of the extended states in a-IGZO thin films.

关 键 词：thin-film transistors amorphous oxide semiconductors magnetron sputtering radio frequency power 

分 类 号：TN321.5[电子电信—物理电子学]