High-Q micro-ring resonators and grating couplers for silicon-on-insulator integrated photonic circuits  

作　　者：仝晓刚 刘俊 薛晨阳 

机构地区：[1]Key Laboratory of Instrumentation Science and Dynamic Measurement,North University of China

出　　处：《Journal of Semiconductors》2013年第8期106-109,共4页半导体学报（英文版）

基　　金：supported by the National Basic Research Program of China(No.2009CB326206);the National Natural Science Foundation of China(Nos.61076111,50975266);the Key Laboratory Fund of China(No.9140C1204040909);the Graduate Innovation Project of China (No.20103083);the Fund for Top Young Academic Leaders of Higher Learning Institutions of Shanxi(TYAL),China

摘　　要：An ultra-small integrated photonic circuit has been proposed,which incorporates a high-quality-factor passive micro-ring resonator（MR） linked to a vertical grating coupler on a standard silicon-on-insulator（SOI） substrate.The experimental results demonstrate that the MR propagation loss is 0.532 dB/cm with a 10μm radius ring resonator,the intrinsic quality factor is as high as 202.000,the waveguide grating wavelength response curve is a 1 dB bandwidth of 40 nm at 1540 nm telecommunication wavelengths,and the measured fiber-to-fiber coupling loss is 10 dB.Furthermore,the resonator wavelength temperature dependence of the 450 nm wide micro-ring resonator is 54.1 pm/℃.Such vertical grating coupler and low loss MR-integrated components greatly promote a key element in biosensors and high-speed interconnect communication applications.An ultra-small integrated photonic circuit has been proposed,which incorporates a high-quality-factor passive micro-ring resonator（MR） linked to a vertical grating coupler on a standard silicon-on-insulator（SOI） substrate.The experimental results demonstrate that the MR propagation loss is 0.532 dB/cm with a 10μm radius ring resonator,the intrinsic quality factor is as high as 202.000,the waveguide grating wavelength response curve is a 1 dB bandwidth of 40 nm at 1540 nm telecommunication wavelengths,and the measured fiber-to-fiber coupling loss is 10 dB.Furthermore,the resonator wavelength temperature dependence of the 450 nm wide micro-ring resonator is 54.1 pm/℃.Such vertical grating coupler and low loss MR-integrated components greatly promote a key element in biosensors and high-speed interconnect communication applications.

关 键 词：high-quality-factor passive micro-ring resonators waveguide grating couplers integrated photonic circuit 

分 类 号：TN622[电子电信—电路与系统] TN43