Fast and accurate measurement of large optical surfaces before polishing using a laser tracker  

作　　者：李杰 吴时彬 

机构地区：[1]Institute of Optics and Electronics,Chinese Academy of Sciences

出　　处：《Chinese Optics Letters》2013年第9期38-40,共3页中国光学快报（英文版）

摘　　要：We present a method that accurately measures large optical surfaces before polishing using a laser tracker. Using the scanning mode of the laser tracker considerably improves measurement efficiency and minimizes the dominant errors caused by environmental change. We use this method to measure a φ1.3-m aspheric mirror and obtain a measurement uncertainty of 0.72 μm （root mean square, RMS）.We present a method that accurately measures large optical surfaces before polishing using a laser tracker. Using the scanning mode of the laser tracker considerably improves measurement efficiency and minimizes the dominant errors caused by environmental change. We use this method to measure a φ1.3-m aspheric mirror and obtain a measurement uncertainty of 0.72 μm （root mean square, RMS）.

关 键 词：POLISHING Uncertainty analysis 

分 类 号：TN247[电子电信—物理电子学]