共面插指电极结构电光聚合物薄膜器件的电光系数测量  

Measurement of the Electro-Optic Coefficients in Electro-Optic Polymer Thin Film Devices with Interdigitated Coplanar Electrodes

作　　者：蒋强[1,2] 王暄[1,2] 李志远[1,2] 

机构地区：[1]哈尔滨理工大学电介质工程国家重点实验室培育基地,黑龙江哈尔滨150080 [2]哈尔滨理工大学工程电介质及其应用教育部重点实验室,黑龙江哈尔滨150080

出　　处：《光学学报》2013年第9期290-294,共5页Acta Optica Sinica

基　　金：国家自然科学基金(60871073)

摘　　要：分析了改进后的共面插指电极在高场强下的电场分布,验证了插指电极结构用于制作电光聚合物薄膜器件的可行性。基于插指电极薄膜器件在极化过程中电场分布的不均匀性,建立了关于电极间距、聚合物厚度、电场分布的三维模型,得到了不同极化电压下的平均场强。为了测试插指电极薄膜器件的电光系数,对三明治结构器件的椭偏透射测量电光系数方法做了改进。在相同电场下,对比了共面插指电极薄膜器件与三明治结构薄膜器件的电光系数,结果表明薄膜器件结构的变化不会引起薄膜本身电光系数的改变。The electric field distribution of modified interdigitated electrodes structure at high fields is analyzed through simulation, and the feasibility that the structure can be used in electro-optic polymer thin film devices is verified. Due to the non-uniform electric field during poling in the thin film devices with interdigitated electrodes, the three-dimensional electric field distribution model related with the electrode gap and the polymer thickness is established, and the average electric field is obtained at different poling voltages. For the changes in the structure of the thin film device with the interdigitated electrodes, the transmission-geometry ellipsometric technique based on device with sandwich structure is modified. In addition, the experimental results of electro-optic coefficients of the devices of the interdigitated coplanar electrodes and the sandwich structure are compared under the same electric field. Experimental results show that changes in the structure of thin film device will not cause the resulting electrooptic coefficients changed.

关 键 词：薄膜 光学器件 电光聚合物 插指电极 电光系数 椭偏透射 

分 类 号：O484.41[理学—固体物理]