基于CMOS传感器的高速高精度激光光束自动准直系统  

Fast and Accurate Laser Beam Automatic Alignment System Based on CMOS Sensor

作　　者：李耀[1,2] 王丁[1] 郭晓杨[1,2] 冷雨欣[1] 

机构地区：[1]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800 [2]中国科学院大学,北京100049

出　　处：《中国激光》2013年第9期240-246,共7页Chinese Journal of Lasers

基　　金：国家973项目(2011CB808101);国家自然科学基金(10734080;60908008;61078037;11204328)

摘　　要：设计了一套激光光束自动准直系统,能够高速、高精度地自动准直激光输出方向。该系统使用了由小孔衍射放大光束抖动的光路和互补金属氧化物半导体传感器组成的传感模块;系统的信号处理模块是以现场可编程门阵列芯片为核心的电路装置,可实现高速计算和反馈控制功能。软件方面,采用了自动定标的算法来确定自动准直过程中所需的驱动信号,可以使光路调节过程中的水平和竖直方向解耦合,提高了调节的精度和速度。该算法可以实现更高程度的自动化控制。设计了实验以验证自动准直系统性能,结果表明,该装置的调整精度为2.5μm,反馈控制频率约为1kHz,可显著降低频率在1kHz以下的光束抖动。A new system is developed to adaptively collimate laser beam direction, with high speed and high accuracy. The sensing module of this system consists of an optical layout using pinhole to amplify the beam drift and a complementary metal-oxide-semiconductor transistor sensor. An field programmable gate array chip is the core of the signal processing module to perform high speed calculation and feedback control. At the aspect of software, an algorithm is designed to derive the driving signal for automatic alignment, which is capable of uncoupling the horizontal and vertical adjustment and suitable for highly accurate automatic control. Experiments are conducted to test the performance of the system. Results show that, the system implements feedback control with accuracy of 2.5 μm and the feedback frequency about 1 kHz, and can obviously reduce the beam drifting with the frequency below 1 kHz.

关 键 词：光学设计 自动准直 光路模型 光电控制 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]