一种新型温度不敏感阵列波导光栅的设计  

A New Design of Temperature-insensitive Arrayed Waveguide Grating

作　　者：张俪耀[1] 吴远大[1,2] 安俊明[1,2] 王玥[1] 潘盼[1] 张晓光[1] 王红杰[1,2] 胡雄伟[1] 

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点联合实验室,北京100083 [2]河南仕佳光子科技有限公司,河南鹤壁458030

出　　处：《半导体光电》2013年第4期549-553,559,共6页Semiconductor Optoelectronics

基　　金：国家自然科学基金重大项目(61090390);国家自然科学基金重点项目(60837001);国家自然科学基金面上项目(61275029;61274047);青年科学基金项目(61205044);国家"863"计划项目(2011AA010303);河南省自主创新基金;河南省重大科技专项项目

摘　　要：提出了一种新型结构的阵列波导光栅。在AWG的阵列波导中嵌入多种补偿介质,补偿二阶或二阶以上温度偏移。首先从理论上推导出器件的工作原理表达式;其次给出了器件结构的设计方案,阵列波导采用同心圆结构设计,使得嵌入介质与波导垂直,有效减小了散射损耗,并显著提高了芯片的集成度。最后,对器件性能进行了评估,引入的附加损耗小于1dB;理论上实现了零温度偏移。For the new structure of arrayed waveguide grating, various kinds of medium are inserted into the arrayed waveguides to compensate the second-order and above temperature offset. Firstly, expressions of the working principle are deduced. Secondly, the structural design of concentric circles is given, which is beneficial to make the inserted medium be vertical with the waveguides so as to significantly reduce the scattering loss and improve the integration level. Finally, the performance of the device is assessed, and it is shown that the additional loss is less than ldB and zero temperature offset is achieved in theory.

关 键 词：阵列波导光栅 温度不敏感 折射率温度系数 补偿介质 同心圆结构 

分 类 号：TN256[电子电信—物理电子学]