PLD法制备LiCoO_2薄膜的研究  

Preparation of LiCoO_2 Thin Film by PLD

作　　者：宋大卫[1] 张联齐[1] 

机构地区：[1]天津理工大学材料科学与工程学院,天津300384

出　　处：《南开大学学报（自然科学版）》2013年第2期6-10,共5页Acta Scientiarum Naturalium Universitatis Nankaiensis

基　　金：国家863项目(2011AA11A234);NSFC(51272175);教育部新世纪优秀人才支持计划(NCET-10-0952)

摘　　要：采用脉冲激光沉积薄膜技术(PLD)制备了LiCoO2薄膜,研究了氧压、衬底、靶与底衬的距离对LiCoO2薄膜结构、化学组成的影响.LiCoO2 thin film was prepared by pulsed laser deposition film technology （PLD）. The effect of oxygen pressure, target, content of Li in target, distance between target and substrate on structure and chemical composition of LiCoO2 thin film were studied.

关 键 词：全固态锂电池 LiCoO2薄膜 固态电解质 界面 PLD 

分 类 号：O646[理学—物理化学]