Ti/Au电极对红外探测器噪声系数的影响研究  

Effect of Ti /Au electrode on noise factor of infrared detector

作　　者：李岩[1] 常玲玲[1] 李慧[1] 吴茂[2] 

机构地区：[1]北京控制工程研究所第十二研究室,北京100190 [2]北京科技大学新材料技术研究院,北京100083

出　　处：《粉末冶金技术》2013年第4期273-278,282,共7页Powder Metallurgy Technology

基　　金：国家自然科学基金资助项目(51204016);高等学校博士学科点专项科研基金项目(20120006120011);中央高校基本科研业务费专项资金项目(FRF-TP-12-154A);国家博士后科学基金项目(11175020)

摘　　要：Mn-Co-Ni-O系半导体陶瓷是最常见的红外热敏电阻材料,但其与传统的Au电极结合强度不高。本文将Ti/Au双层电极用于半导体陶瓷晶片,研究了Ti/Au电极对界面结合强度和热敏电阻噪声系数的影响规律。研究发现,Ti/Au电极能与半导体陶瓷保持良好的界面结合强度,同时使热敏电阻具有较低的噪声系数;Ti/Au电极影响热敏电阻噪声系数的机理是由于Ti扩散到Au表面形成钛氧化物引起的;在对Ti/Au电极的热处理过程中,Ti与陶瓷晶片基体间发生界面反应,同时Ti元素会向Au薄膜表面扩散;提高Ti/Au热处理温度或增加Au薄膜厚度、减少Ti镀膜厚度均能抑制Ti原子向Au薄膜表面扩散,从而降低热敏电阻的噪声系数。Mn-Co-Ni-O system semiconductor ceramic is the most common infrared thermistor material,but it has a weak bonding strength with the conventional Au electrode.In this paper,the Ti / Au double layer electrode was used as electrode of semiconductor ceramic wafer,and the effects of Ti / Au electrode on interfacial bonding strength and noise factor were investigated.It is found that the Ti / Au electrode has a good bonding strength with the semiconductor ceramic wafer,and the thermistor has relative low noise factor.The influence mechanism of Ti / Au electrode on noise factor is due to the titanium oxide,which is formed by Ti element diffusion through Au layer and reaction with oxygen.During the heat treatment,the Ti layer reacts with the wafer substrate,in the meantime,the Ti element diffuses through the Au layer.Elevating the heat treatment temperature,increasing the thickness of Au layer or decreasing the thickness of Ti layer can inhibit the diffusion of Ti element to the Au surface,and the noise factor is declined consequently.

关 键 词：热敏电阻 噪声系数 TI AU电极 界面反应 扩散 

分 类 号：TN722[电子电信—电路与系统]