8英寸RTP炉电磁驱动旋转结构设计研究  

Study on 8-inch RTP Furnace Electromagnetic Drive Rotating Structure

作　　者：狄杰建[1] 郭翱杰[1] 李晓辉[1] 

机构地区：[1]北方工业大学机电工程学院,北京100144

出　　处：《北方工业大学学报》2013年第3期56-59,共4页Journal of North China University of Technology

摘　　要：基于电磁原理,提出了电磁驱动旋转结构.通过理论计算,确定了电磁驱动旋转系统的启动力矩和励磁磁动势.通过数值仿真,研究了伸入量和气隙对电磁转矩的影响.结果发现,气隙越小,转矩越大；气隙在0～5mm内,伸入量越大,转矩越大；5～14mm内,伸入量越大,转矩越小.研究结果对于RTP炉电磁驱动旋转结构设计,具有一定的指导意义.Based on the electromagnetism theory, the electromagnetic drive rotating structure is put forward. The starting torque and excited magnetomotive force of the electromagnetic rotating structure are obtained through theoretical calculation. Using numerical ANSYS simulation, a study is carried out about the influence of the amount of infixing and gap on the electromagnetic torque. The result shows that the smaller the gap, the bigger the torque. When the gap is in the range of 0~5mm, the torque increase with the infixing, and when the gap is in the range of 5~14mm, the torque gets smaller with the increases of the infixing. The result of the study is valuable in the design of 8-inch RTP furnace＇s electromagnetic rotating structure.

关 键 词：RTP炉 ANSYS仿真 电磁驱动旋转结构 

分 类 号：TH89[机械工程—仪器科学与技术]