基于二维傅里叶变换的单帧干涉图相位提取方法  

Phase extraction for single frame interferogram based on 2D Fourier transform

作　　者：单小琴[1] 朱日宏[2] 李建欣[2] 

机构地区：[1]南京理工大学紫金学院,江苏南京210046 [2]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《应用光学》2013年第5期802-808,共7页Journal of Applied Optics

基　　金：国家自然科学基金资助项目(61108041)

摘　　要：针对大口径光学元件干涉测试过程中,测试装置和干涉腔长较大,气流扰动和环境振动对移相测试过程产生影响等问题,采用一种基于二维傅里叶变换的单帧干涉图处理方法,只需要对一幅空间载频干涉条纹图进行处理即可获得待测相位,具有抗振测试的优点。对该方法的基本原理和算法过程进行分析,并对近红外大口径移相平面干涉仪中600mm口径的光学平晶进行了面形测试。实验结果表明:采用该方法所得波面峰谷值(PV)为0.112λ,波面均方根值(RMS)为0.014λ,与移相算法所得波面数据相比,波面峰谷值偏差不到(1/500)λ;波面均方根值(RMS)偏差几乎为零。For the interferometric testing of optical elements with large aperture, due to large testing device and interferometric cavity length, the process of phase-shifting interferometry was affected by airflow disturbance and environmental vibration. In order to overcome the a- bove factors, a single interferogram processing method based on two-dimensional fast Fourier transform（FFT） was proposed. This method only required one single spatial carrier fringe pat- tern to obtain the phase, which had the advantage of anti-vibration testing. The basic principle and the process of algorithm were analyzed, and the optical element with 600 mm large aper- ture in the near-infrared phase-shifting Fizeau interferometer was tested. Experimental results show that the peak-to-valley （PV） value and root mean square （RMS） value of the wavefront obtained by FFT method are 0. 112 λ and 0. 014λ respectively, compared with the results ob- tained by phase-shifting method, there are a difference less tham （1/500）,t in PV and almost zero difference in RMS.

关 键 词：移相干涉 相位提取 干涉图 傅里叶变换 

分 类 号：TN911.73[电子电信—通信与信息系统] TH744[电子电信—信息与通信工程]