双曲面四极质量分析器制造工艺研究  

Research on a Manufacturing Process of the Hyperboloidal Quadrupole Mass Filter

作　　者：吴定柱[1] 刘兴宝[1] 蒋家东[1] 钱志强[1] 岳晓斌[1] 

机构地区：[1]中国工程物理研究院机械制造工艺研究所超精密加工技术重点实验室,四川绵阳621900

出　　处：《机械设计与制造》2013年第10期122-123,127,共3页Machinery Design & Manufacture

基　　金：国家重大仪器专项课题(2011YQ130043)

摘　　要：作为研究物质基本组成、结构特征、物理和化学性质的最基本的仪器—质谱仪,由于其直接测量的本质和高灵敏、高分辨性,被广泛应用于环境监测、食品安全、生命科学等多个领域。四极质量分析器是四极式质谱仪的核心部件,其零件及部件主要精度误差都要求小于0.005mm,传统制造工艺已经无法满足要求。提出了一种零件组合和部件组合加工方法,利用该方法加工了一套双曲面型四极质量分析器,加工后零件的表面粗糙度为Ra0.2μm、两组对杆140mm范围内平行度4μm。As the the most basic instruments in researching material composition, structure characteristics, basic physical and chemical properties - mass spectrometer, due to its nature of direct measurement and high sensitivity, high resolution, is widely used in environmental monitoring, food safety, life science and otherfields. The quadrupole mass filter is one of the most important parts in mass spectrometry （MS） used in the analysis areca But the manufacturing errors and the assembly errors of the parts are all less the 0.005 millimeter, which has not been met for the traditional manufacturing method. A new machiningprocess of the hyperboloidal quadrupale mass filter is put forward. One has been made by this method. The machining accuracy of the roughness is Ra0.2μm, and the depth of parallelism for the two opposite ploes is 4μm in long direction （range： 140mm ）.

关 键 词：四极质量分析器 双曲面极杆 组合加工 比较测量 

分 类 号：TH16[机械工程—机械制造及自动化] TH832.42