ICF终端光学元件损伤在线检测装置的研究  

Final optics damage online inspection system for ICF

作　　者：冯博[1] 刘炳国[1] 陈凤东[1] 刘国栋[1] 彭志涛[2] 元浩宇[2] 孙和义[1] 

机构地区：[1]哈尔滨工业大学电气工程及自动化学院,黑龙江哈尔滨150001 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《红外与激光工程》2013年第9期2519-2524,共6页Infrared and Laser Engineering

基　　金：国家自然科学基金(61275096)

摘　　要：终端光学元件是惯性约束聚变（ICF）系统最重要的组成部分之一。文中针对ICF系统中终端光学元件损伤的高精度、高效率检测问题，对光学元件损伤在线检测技术进行了研究，以“神光一Ⅲ原型装置”终端光学元件为检测对象设计了光学元件损伤在线检测系统。针对终端光学元件的排布特点及其检测要求，利用CODEV软件设计了高分辨率变焦距望远光学系统；根据终端光学元件在靶室中的分布位置，设计了相应的对准及定位系统，实现了对球体空间排布的大尺寸光学元件组的远距离、高精度、实时快速检测。模拟ICF靶场环境进行了离线仿真实验，实验表明：系统的MTF曲线在68lp／mm大于0．4，踟％能量分布在2×2像元内。在1．8～2．8m的工作距离下，检测装置对300mm×300mm视场范围内60μm以上的损伤点可以通过图像处理方法进行分辨，160μm以上的损伤点可以进行精确测量；姿态调整系统各运动环节运行精度均优于13arc sec，满足检测要求。Final optics play an important role in Inertial Confinement Fusion （ICF） system. In this paper, the online inspection technology for final optics damage was studied in order to build a final optics damage online inspection system for ＂ShenGuang-111 （SG-11 ） prototype device＂. According to the assignment of final optics in optical module, a zoom telescope optical system with high resolution was designed by CODEV to meet the testing requirement. Based on the assignment of optical modules in target chamber, the positioning mechanism was designed to focus and switch the beamlines and the optics accurately and rapidly. At last, an off-line simulation experiment based on ＂SG-III＂ was carried out. The result shows that the MTF at the spatial frequency of 68 lp/mm is greater than 0.4, 80% of the energy is distributed within 2 ×2 CCD cells. Between 1.8 m to 2.8 m, the resolution of the optical detecting mechanism can reach 160 μm. The defects can be tracked when their diameter is up to 60 μm by image processing method. The precision of the positioning mechanism is better than 13 arc sec.

关 键 词：在线检测 终端光学元件 变焦距光学系统 

分 类 号：TH247[机械工程—机械制造及自动化]