基于纳米压痕试验的316L不锈钢表面钛、TiN薄膜结合性能的有限元模拟  

Finite Element Simulation of Bonding Properties for Ti,TiN Films on 316L Stainless Steel Based on Nanoindentation Experiments

作　　者：张星[1] 王鹤峰[1] 袁国政[1] 树学峰[1] 

机构地区：[1]太原理工大学应用力学与生物医学工程研究所,太原030024

出　　处：《机械工程材料》2013年第9期90-95,共6页Materials For Mechanical Engineering

基　　金：国家自然科学基金资助项目(11172195)

摘　　要：通过纳米压痕试验测得316L不锈钢基体、纯钛薄膜与TiN薄膜的弹性模量、硬度和压痕过程载荷-位移曲线;采用ANSYS有限元分析软件建立纳米压痕试验的有限元模型,通过量纲分析方法推导出上述材料在纳米尺度下的双线性应力-应变关系,并计算得到相应载荷-位移曲线;利用有限元模型分析了两种薄膜/基体间的结合性能。结果表明:纳米压痕试验和有限元模拟得到的载荷-位移曲线吻合较好,利用模型定性判断TiN薄膜与基体的结合性能优于纯钛薄膜的,与划痕试验结果相符,验证了此方法的可行性。The modulus, hardness and indentation load-displacement curves of 316L stainless steel substrate, Ti film and TiN film were obtained by nanoindentation tests. The bilinear stress and strain relation of above materials was deduced by ANSYS finite element simulation and dimensional analysis, and then the corresponding indentation load-displacement curves obtained by computation and the bonding property of these two films/substrate systerms were analysed by the model. The results show that the identation load-displacement curves from computation were agreement well with that from nanoindentation tests. It was qulitatively indicated that the bonding property between TiN film and substrate was better than that between Ti film and substrate, which fitted the stratch test result well, proving the validity of the proposed method.

关 键 词：薄膜 纳米压痕 有限元 应力应变关系 

分 类 号：TG146.2[一般工业技术—材料科学与工程]