真空用R_2Co_(17)稀土钴磁柱表面净化工艺的改进  

The improvement on surface cleaning process of magnetic R_2Co_(17)rare earth cobalt cylinder parts

作　　者：李蓉[1] 陈虎[1] 李剑[1] 唐国云[1] 伍智[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621999

出　　处：《真空》2013年第5期70-71,共2页Vacuum

摘　　要：本文对R2Co17磁柱零件的表面净化工艺加以改进,采用电化学工艺,效果良好。结果表明,R2Co17稀土钴磁柱零件采用电化学净化工艺,表面残留磁粉少,表面平整光亮,更好地满足了真空器件对该零件的要求。The electrochemical process was effectively applied to the improvement on surface cleaning of magnetic R2Co17 rare earth cobalt cylinder parts.The results show that the parts leave less magnetic powders,and the surface becomes flat and smooth after the electrochemical cleaning process.Those advantages can be better meet the need of vacuum devices.

关 键 词：R2Co17稀土钴 电化学法 表面净化 工艺改进 

分 类 号：TB79[一般工业技术—真空技术]