光刻投影物镜V形柔性轴向调节机构设计  

Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective

作　　者：孙振[1] 巩岩[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《激光与光电子学进展》2013年第10期93-99,共7页Laser & Optoelectronics Progress

基　　金：国家重大科技专项02专项(2009ZX02005);科技部中白国际合作项目(2011DFR10010)

摘　　要：为了满足光刻投影物镜对轴向调节机构的调节行程大、精度高、结构紧凑等需求,基于三角形换向原理,设计了轴向调节机构。在调节机构中采用V形柔性单元换向机构,实现运动的换向和传递。针对机构的调节行程、驱动力、一阶固有频率以及机构传动比的要求,优化了V形柔性单元的结构尺寸参数。使用有限元方法分析了V形柔性单元的关键尺寸参数对机构性能的影响,得到机构调节行程可达±55μm,调节精度优于±10nm,一阶固有频率大于150Hz。同时仿真分析了该轴向调节机构对光学元件的热变形的影响,在20mW热载荷的作用下,该轴向调节机构导致光学元件面形变化为0.087nm[峰谷(PV)值]和0.013nm[均方根(RMS)值]。仿真结果证明该轴向调节机构对光学元件面形精度影响极小,满足光刻物镜应用要求。An axial adjusting mechanism is designed to meet the requirement of long adjusting distance, high precision and compact structure in projection objective, based on triangular switching principle. V-flexure element is designed to achieve the switching and transmission of motion in adjusting mechanism. The parameters of V-flexure element are optimized to satisfy the requirement of adjusting distance, drive force, frequency and ratio of transmission. The influence of changing V-flexure element parameters on mechanism performance is analyzed by finite element analysis method. The result is that the adjusting distance is ± 55 μm, the adjusting precision is better than ±10 nm and the frequency is more than 150 Hz. And then thermal deformation of lens is analyzed when the thermal load is 20 mW. The result is that the peak-to-valley （PV） value of the upper surface is 0. 087 nm, and the root-mean-square （RMS） value is 0. 013 nm. The simulation results show that the influence of axial adjusting mechanism on lens surface figure precision is small. Such an axial adjusting mechanism can satisty the requirement of lithograph projection objective.

关 键 词：成像系统 光刻投影物镜 轴向调节机构 V形柔性单元 热变形 

分 类 号：TH703[机械工程—仪器科学与技术]