制造纳米电子器件的技术途径  

The Ways to Fabrication of Nano Electron Devices

作　　者：顾宁[1] 黄岚 张宇[1] 廖建辉 夏强[1] 王伟 傅德刚 沈浩瀛[2] 陈堂生 郝西萍 彭力 赵丽新 

机构地区：[1]东南大学生物科学与医学工程系,南京210096 [2]信息产业部电子科学研究院第55所,南京210016 [3]华晶电子集团公司掩模制造工厂,无锡214061

出　　处：《测试技术学报》2000年第4期241-246,共6页Journal of Test and Measurement Technology

基　　金：国家自然科学基金;教育部优秀青年教师教学科研奖励基金(1999);国家自然科学基金!(69890220)的资助

摘　　要：目的　为发展纳米电子器件及纳米电子学技术寻找有效途径 .方法　对目前制造纳米电子器件的主要途径 ,例如基于三束的光刻加工技术、分子组装与纳米微粒排列技术、扫描力探针加工技术等进行了概略的介绍 ,讨论了各种方法所存在的优势与限制 .结果　对基于分子组装与纳米光刻的纳料制造技术给予很大的重视 .Aim\ To search for the suitable ways to develop the nanoscale electronic devices and the techniques of nano electronics. Methods\ The brief introduction of main techniques, by which the nano electronic devices could be fabricated, is given. These techniques include molecular assembly, arrangement of nano particles, scanning force microscopy fabrication and nano lithography based on photon beam, electron beam, and ion beam. The advantage and limitation of these methods are also discussed. Results\ The combination of molecular self assembly and nano lithography should be more important. Conclusion\ It is suggested that the better way for realization of nano electronic devices under our present conditions should be combination of two or three methods mentioned above.

关 键 词：纳米器件 纳米光刻 分子组装 纳米微粒 扫描力探针显微术 

分 类 号：TN303[电子电信—物理电子学] TB383[一般工业技术—材料科学与工程]