碲锌镉阵列探测器的研究  

A Research on CdZnTe Array Detector

作　　者：蔡明生[1,2] 郭建华[1,2] 谢明刚[1,2,3] 郑春晓[1,2,3] 

机构地区：[1]中国科学院紫金山天文台,南京210008 [2]中国科学院暗物质与空间天文重点实验室,南京210008 [3]中国科学院大学,北京100049

出　　处：《天文学报》2013年第5期467-477,共11页Acta Astronomica Sinica

基　　金：中国科学院知识创新工程重要方向项目(空间科学预先研究项目);国家自然科学基金项目(11003051;11273070)资助

摘　　要：碲锌镉(CdZnTe)阵列探测器是近年来迅速发展的新型半导体探测器,具有高空间分辨率、高能量分辨率和可在室温下工作的特点.介绍了碲锌镉晶体的物理特性和工作原理,并重点叙述了碲锌镉阵列探测器的制作工艺,包括晶片的预处理、钝化、欧姆电极制作、阵列模板选择、阵列封装工艺选择(微互联方式).为了测试碲锌镉探测器性能,中国科学院暗物质与空间天文重点实验室和合作单位成功制作了4 pixel×4 pixel和8pixel×8 pixel碲锌镉阵列(厚度分别为5mm和2 mm,像素大小为2 mm×2 mm,间隙分别为0.15 mm和0.2 mm).在^(137)Cs放射源照射下,实验室利用自行研制的、基于ASIC(Application Specific Integrated Circuit)芯片的多通道电子读出系统,对4 pixel×4 pixel碲锌镉阵列进行了实验评估,首次获得了16 pixel的能谱以及对应的能量分辨本领,其最优分辨本领达4.8%@662 keV.The CdZnTe array detector is a new type of semiconductor detector, and it has been developing rapidly in recent years. It has some characteristics of high spatial reso- lution, high energy resolution, and it can work at room temperature. This article describes the physical characteristics and the working principle of the CdZnTe detector. It also intro- duces the production process of the CdZnTe array detector, including the pretreatment of the chips, passivation, ohmic electrode production, array template selection, and array pack- age process selection （micro-interconnect）. For evaluating the performance of the detector, the authors produced a 4 pixel x 4 pixel CdZnTe array and an 8 pixel x 8 pixel CdZnTe array （The thicknesses are 5 mm and 2 mm, respectively. The pixel size is 2 mm x 2 ram. The gaps are 0.15 mm and 0.2 mm, respectively.） with cooperation partner successfully. A multi-channel electronic readout system based on the ASIC （Application Specific Integrated Circuit） chip is used for the charge measurement of the 4 pixel x 4 pixel array of CdZnTe. The 16-pixel spectrum and the corresponding energy resolution are obtained with the 137Cs radiation source. Among the results of each pixel, the best resolution is 4.8%-662 keV.

关 键 词：仪器 探测器 太阳 X射线 Γ射线 技术 成像频谱学 

分 类 号：P111[天文地球—天文学]