基于MEMS技术新型湿度传感器的研制  

Development of a Novel Humidity Sensor by the MEMS Technology

作　　者：吴大军[1,2] 唐祺 杨姗姗[2] 温殿忠[4] 

机构地区：[1]江苏省电子产品装备制造工程技术研究开发中心,江苏淮安223003 [2]淮安信息职业技术学院电子工程学院,江苏淮安223003 [3]飞兆半导体(北京)有限公司,北京100084 [4]黑龙江大学集成电路重点实验室,哈尔滨150081

出　　处：《微纳电子技术》2013年第9期570-575,共6页Micronanoelectronic Technology

基　　金：江苏省科技厅科技创新与成果转化(科技服务平台)专项引导资金项目(BM2009825);淮安市产学研合作计划研究项目(HAC201111);淮安信息职业技术学院青年基金项目(HXYQ2013004)

摘　　要：描述了新型金属-Al2O3-PI-金属电容式湿度传感器的结构及工作原理,利采用Matlab软件模拟了介电常数和湿度的关系,采用MEMS技术制造了新型湿度传感器,设计了测试方案,测量和分析了该新型湿度传感器的灵敏度特性和迟滞特性,分析了测试数据产生偏差的原因。测试结果显示,湿度传感器的灵敏度为单位湿度变化8 pF,湿度低于RH80%,线性度非常好。湿度传感器的迟滞特性良好,在RH70%时,迟滞差最大约为RH3%。分析结果表明,该湿度传感器结构合理,工艺成功,重点解决了该传感器的涂覆聚酰亚胺后蒸铝工艺与CMOS标准工艺兼容问题。为利用CMOS标准工艺进行集成MEMS湿度传感器的研制做出了有益的尝试,传感器的线性度和迟滞特性指标符合要求,该新型湿度传感器在现代MEMS技术中具有良好的应用前景。The structure and operating principle of a novel metal-Al2O3-PI-metal capacitive hu- midity sensor were depicted, which was fabricated with the MEMS technology. The relationship between the dielectric constant and moisture was simulated by Matlab software. To measure and analyze the sensitivity and hysteresis characteristics of the humidity sensor, the test scheme was designed. The deviation reason of the output data was analyzed. The test results show that the sensitivity of the humidity sensor is 8 pF per humidity, and the linearity is very good when the humidity of the atmosphere is lower than RH80%. The hysteresis characteristics of the humidity sensor is good and the maximum retardation value about RH3 ~ is obtained when the humidity of atmosphere is lower than RH70%. The analysis results show that the humidity sensor has a rea- sonable structure and the process is successful. It solves the problem that the process of aluminum vapor deposition after the coated polyimide is not compatible with the CMOS standard process, which has made a beneficial attempt for the development of integrated MEMS humidity sensors using the CMOS standard process. The analysis result shows that the linearity and hysteresis characteristics of the humidity sensor meet the requirement, which has a good application prospect in the modern MEMS technology.

关 键 词：微电子机械系统(MEMS) 聚酰亚胺(PI) 湿度传感器 COMS工艺 灵敏度 

分 类 号：TH703[机械工程—仪器科学与技术] TP212.1[机械工程—精密仪器及机械]