衬底退火温度对ZnO纳米结构形貌和发光特性的影响  

Effect of annealing temperature of substrate on the morphologies and luminescence properties of ZnO nanostructures

作　　者：陈速娟[1] 郑卫峰[1] 林算治[1] 瞿燕[1] 赖发春[1] 

机构地区：[1]福建师范大学物理与能源学院,福建福州350007

出　　处：《光电子．激光》2013年第10期1953-1959,共7页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(11074041;11374052);福建省自然科学基金(2012J01256;2013J01174)资助项目

摘　　要：利用热蒸发Zn粉的方法,在Au/掺铝氧化锌(AZO)/石英衬底上生长ZnO纳米结构。为了研究不同温度退火后的衬底对生长的ZnO纳米结构的影响,Au/AZO/石英衬底在生长纳米结构前分别在300、500和700℃真空下退火。Au/AZO/石英衬底的表面形貌用原子力显微镜(AFM)观测。ZnO纳米结构的微结构、形貌和光学性能分别用X射线衍射(XRD)、扫描电子显微镜(SEM)、透射电子显微镜(TEM)和荧光光谱仪进行测量。结果表明,在未退火和300℃退火衬底上生长了大量的ZnO纳米棒,而在500℃和700℃退火衬底上沉积了大量ZnO纳米颗粒。单晶结构的纳米棒的平均直径分别约50nm和80nm,其生长机制为蒸气-液体-固体(VLS)生长机制。荧光光谱显示所有的样品都存在紫外发光峰和深能级发射带,随着退火温度的升高,生长的纳米结构的紫外发光峰相对强度增强,而深能级发射强度减弱。ZnO nanostructures were successfully grown on Au/Abdoped ZnO （AZO） film/quartz sub- strates by thermal evaporation of Zn powders. In order to investigate the effect of post-annealed substrate on the growth of ZnO nanostructure,Au/AZO/quartz substrates were annealed at 300 ℃, 500 ℃ ,and 700℃ in vacuum, respectively. The surface morphologies of substrates were observed by atomic force microscopy （AFM）. The microstructure, morphologies, and optical properties of ZnO nanostructures were studied by X-ray diffraction （XRI））, scanning electron microscopy （SEM）, transmission electron microscope （TEM）, and fluorescence spectrophotometer, respectively. The results show that high-density ZnO nanorods were grown on the as-deposited and annealed substrate at 300 ℃, while nanoparticles were observed on the substrates annealed at 500℃ and 700℃. The average diameters of the nanorods with single-crystalline structure are about 50 nm and 80 nm. The grown mechanism of nanorods is va- por-liquid-solid （VLS） mechanism. Room temperature photoluminescence （PL） spectra show that the PL spectra of all samples have a UV emission peak and a broad deep-level emission peak. Moreover,as the annealing temperature increases, the intensity of UV emission enhances and the intensity of deep-lev- el emission declines.

关 键 词：ZNO 纳米结构 热蒸发 衬底 退火 

分 类 号：O484[理学—固体物理]