氧化铝涂层钼模具的制备  

Preparation of Mo Mould Coated with Superfine Al_2O_3 by Flame Plating

作　　者：赵建东[1] 郝保良[1] 刘燕文[1] 徐振英[1] 孟明凤[1] 

机构地区：[1]中国科学院电子学研究所,北京100190

出　　处：《真空电子技术》2013年第4期77-78,共2页Vacuum Electronics

摘　　要：采用喷涂法在钼模具基底上沉积一层超细Al2O3,在H2气保护气氛下,经过高温烧结形成一层致密的α-Al2O3氧化膜。制备的模具结构尺寸精度较高,而且涂层氧化铝不与焊料浸润,克服了不锈钢模具配合间隙较难控制,三高石墨蒸散污染以及纯钼模具粘模的缺点。Superfine Al2O3 particleswere deposited on the Momould by flame plating,then the dense α-Al2O3 coatingon the surface of MoMould were fabricated by firing at high-temperature in H2 atmosphere.The accuracy of mould was high,and the coating Al2O3 layers were infiltrated by solder.The disadvantage of stainless steel,graphite and pure Mo as mould wereovercome.

关 键 词：喷涂 钼基底 超细氧化铝 高温烧结 

分 类 号：TB756[一般工业技术—真空技术]