宽离子能量检测范围垂直引入反射式飞行时间质谱仪的研制  

Development of Orthogonal Acceleration Time-of-Flight Mass Spectrometer for Detection of Ions with Wide Energies Distribution

作　　者：谭国斌[1] 黄正旭[2] 高伟[2] 周振[2,3] 

机构地区：[1]上海大学环境污染与健康研究所,上海200444 [2]暨南大学大气环境安全与污染控制工程研究所,广州510632 [3]广州禾信分析仪器有限公司,广州510530

出　　处：《分析化学》2013年第10期1614-1619,共6页Chinese Journal of Analytical Chemistry

基　　金：国家863项目(No.SS2012AA063201)资助

摘　　要：本实验室研制了国内首台宽离子能量检测范围飞行时间质谱仪。仪器采用紧凑式电子轰击源设计，配合离子透镜系统有效的调制离子流，飞行时间质量分析器采用了离子垂直引入式，双场加速和双场反射以及大尺寸MCP检测装置设计。仪器单离子信号半峰宽约2ns，仪器分辨率优于1600FWHM，检测实际样品质量范围为1～127amu（仪器理论质量检测上限优于800ainu），可检测离子能量范围优于2个数量级（3～140eV）。若该TOF质量分析器与短瞬高压脉冲放电离子源耦合联用，可广泛应用于高能离子束的快速检测，如真空阴极放电对制备薄膜、离子注入材料的表征，导电材料的离子电荷态分布以及离子扩散速度的测定等。A wide detection range of ion energy time-of-flight （TOF） mass spectrometer was developed successfully. The instrument coupled associated with electron impact source, ions flow was modulated effectively by a lens system, and then introduced into time-of-flight mass analyzer, which had dual field of acceleration region and reflection region, and a large-size microchannel plate （MCP） detection device. Half-peak width of single ion signal is about 2 ns, resolution of the instrument is better than 1600 FWHM, mass range of actual samples is 1-127amu （theoretical mass detection limit could be higher than 800 amu）, ion energy detection range is better than two orders of magnitude （3-140 eV）. If couple associated with short-instantaneous pulse discharge ion source, the TOF mass analyzer could be used in the field of rapid detection of high-energy ion beam, such as vacuum cathode discharge preparation of thin films, ion injection material characterization, the ion charge state distribution of conductive material and determination of ion diffusion speed.

关 键 词：宽离子能量检测范围 电子轰击离子源 飞行时间质谱仪 

分 类 号：O657.63[理学—分析化学]