硅氢氯化法生产三氯氢硅清洁生产评价指标体系  

Evaluation Index System for Trichlorosilane Cleaner Production from Silicon and Hydrogen Chloride

作　　者：马红娜[1] 武征[1] 孙愿[1] 刘玉龙[1] 

机构地区：[1]中国地质调查局西安地质调查中心,陕西西安710054

出　　处：《化工环保》2013年第5期426-430,共5页Environmental Protection of Chemical Industry

摘　　要：以国内先进企业的数据为基准值,采用层次分析法建立了由定量和定性两部分评价指标构成的硅氢氯化法生产三氯氢硅清洁生产评价指标体系,确定了评价指标体系准则层、指标层各定量指标权重值及定性指标分值,介绍了定量评价指标和定性评价指标的考核评分计算方法和综合评价指数的计算方法。应用该评价指标体系,对某三氯氢硅生产企业进行了实例评价,结果表明该评价指标体系能较好的反映三氯氢硅企业的清洁生产水平。Based on the data from the advanced enterprises in China, the evaluation index system for cleaner production of trichlorosilane from silicon and hydrogen chloride is founded by analytic hierarchy process, which is composed of two parts of quantitative and qualitative evaluation indexes. The weight values of quantitative indexes and the scores of qualitative indexes of the rule layers and index layers in the evaluation index system are determined. And the computing methods for examining and grading of the quantitative and qualitative evaluation indexes and for the comprehensive assessment indexes are introduced. A trichlorosilane production enterprise was evaluated as an example using this evaluatiom index system. The results show that the evaluation index system can well reflect the level of cleaner production of the trichlorosilane enterprise.

关 键 词：三氯氢硅 硅氢氯化法 清洁生产 层次分析法 评价指标体系 基准值 权重值 

分 类 号：X38[环境科学与工程—环境工程]