Research on the temperature characteristic of Love wave device with structure of multi-waveguides used for gas sensor  

作　　者：WANG Wen HOU Jiaoli SHAO Xiuting LIU Minghua HE Shitang 

机构地区：[1]Institute of Acoustics,Chinese Academy of Sciences

出　　处：《Chinese Journal of Acoustics》2013年第4期345-356,共12页声学学报（英文版）

基　　金：supported by the National Nature Science Foundation of China(11074268,10834010)

摘　　要：This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability. The theoretical model dealing with the Love wave propagation in multi-waveguides was established first, the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions. Combing with the dispersion characteristics and Tomar＇s method, the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted, and confirmed by the following experimental results. Excellent temperature coefficient of the Love wave device with SU-8/SiO2 on ST-90°X quartz substrate was evaluated experimentally as only 2.16 ppm/℃, which agrees well with the calculated results. The optimized Love wave device is very promising in gas sensing application.This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability. The theoretical model dealing with the Love wave propagation in multi-waveguides was established first, the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions. Combing with the dispersion characteristics and Tomar＇s method, the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted, and confirmed by the following experimental results. Excellent temperature coefficient of the Love wave device with SU-8/SiO2 on ST-90°X quartz substrate was evaluated experimentally as only 2.16 ppm/℃, which agrees well with the calculated results. The optimized Love wave device is very promising in gas sensing application.

关 键 词：wave Research on the temperature characteristic of Love wave device with structure of multi-waveguides used for gas sensor exp SiC 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]