自动检测集成电路芯片系统设备的集成研究  

The integration research of auto－ detecting machine of integration circuit chip

作　　者：左建中[1] 李乃华[1] 王刚[1] 张新荣[2] 张钢[2] 

机构地区：[1]天津大学机械工程学院,天津 300072 [2]天津大学电子信息工程学院

出　　处：《制造业自动化》2000年第11期30-33,共4页Manufacturing Automation

基　　金：天津自然科学基金

摘　　要：在制造业中，加工检测设备功能重复，工序重叠是常见的情况。本文研究将集成电路芯片制造厂的两套自动检测系统设备合并成为一套自动检测设备。实验表明，集成后的系统设备用一个检测工时可完成原来两套检测系统设备用两个检测工时的检测项目，检测效率可提高一倍，所用设备数目可减少 1/2，厂房占用面积可节省 1/2，可显著降低芯片生产成本，对制造业提高生产效益有重要参考意义。In manufacturing field, what usually happened is the repeat of manufacturing and detecting machines function and work order. What this article researches is how to join two sets of auto－ detecting machines, which are produced by a integration circuit chip manufacturing corporation, together into one set. Indicate to the experiment, the integrated machine can spend one work－ time. So the detecting efficiency is double, the mumber of used machine decreases a half and the workshop building occupation decreases a half. It is appreciable to decrease the cost of chip' s producing. It is significant for manufacturing field to improve the productive efficiency.

关 键 词：管脚尺寸 系统集成 集成电路芯片 自动检测 

分 类 号：TN407[电子电信—微电子学与固体电子学]