超薄AAO模板法辅助生长高密度有序金纳米点阵列  

Fabrication of High-Density and Ordered Au Nanodot Arrays by Ultra-Thin Anodic Aluminum Oxide (AAO) Membranes

作　　者：杨震[1,2] 张璋[1] 黄康荣[1] 周青伟[1] 刘利伟[1] 

机构地区：[1]华南师范大学华南先进光电子研究院,先进材料研究所,广东广州510006 [2]华南师范大学物理与电信工程学院,广东广州510006

出　　处：《华南师范大学学报（自然科学版）》2013年第5期51-54,共4页Journal of South China Normal University(Natural Science Edition)

基　　金：国家自然科学基金项目(51202072)

摘　　要：在高真空状态下采用孔径为40 nm的超薄阳极氧化铝(AAO)模板作为掩膜进行金的热蒸镀,制备了平均粒径为35.5 nm、填充密度为1.45×1010cm-2的金纳米点阵列.探索了高密度有序纳米点阵列的制备工艺.通过扫描电子显微镜(SEM)和原子力显微镜(AFM)对金纳米点阵列进行表面形貌表征,证明超薄AAO模板法明显改善了金纳米点阵列分布的尺寸均匀度和有序度.High-density Au nanodot arrays have attracted a lot of interests because of their potential applications in catalyst and biosensor. This article focused on the research of the manufacture of high-density and well-ordered Au nanodot arrays with size of 40 nm ultra-thin Anodie Aluminum Oxide （AAO） membrane （ the result of our experimental exploration） being the mask. Well-ordered Au nanodot arrays have fabricated by high-vacuum Au thermal evaporation with the help of AAO masks bonded on the desired substrates. The diameters of Au nanodots have been highly controlled with 35.5 nm, the packing-density could achieve to as high as 1.45 ×10^11 cm^-2. The morphology of the Au nanodot arrays has been investigated by the SEM and AFM. The SEM images confirmed that the uniformity of the size distribution and structural ordering of Au nanodot arrays had been improved by the two-step anodization of AAO.

关 键 词：金纳米点阵列 AAO模板 热蒸镀 二步氧化法 

分 类 号：TB383[一般工业技术—材料科学与工程]