一种新型多反射栅声表面波化学量传感器的研究  

A Multiple-reflector SAW Chemical Sensor

作　　者：董永贵[1] 程卫东[1] 王生江[1] 冯冠平[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《压电与声光》2000年第6期353-356,共4页Piezoelectrics & Acoustooptics

摘　　要：提出了一种新的延迟线型声表面波化学量传感器。作为敏感组件的声表面波器件由 1组叉指换能器和多个反射栅组成。经过高频调制的脉冲信号通过叉指换能器在器件表面激励起声表面波 ,遇到反射栅发生反射 ,反射回来的声表面波再由叉指换能器转化成电信号。 N个反射栅即可形成 N个反射脉冲。通过测量各个反射脉冲之间的传输时间 ,即可实现对相应各反射栅之间表面状态的检测。当各反射栅之间制备有化学敏感膜时 ,即可实现新型化学量传感器。这种传感器的一个最突出的特点是可在同一压电基片上实现多个传感器 ,形成传感器组。A new kind of delay line surface acoustic wave(SAW)device,with one IDT and multiple reflectors isintroduced.The SAW is excited on the surface of the substrate by a high frequency modulated burst.Reflections occur when the SAW reaches the reflectors.The IDT tranduces the echoed SAW back into electrical signal.When there are N reflectors,there are N echoed bursts in the echoed signal.Thus by measuring the transit time between the separated echoed bursts,the surface states between the corresponding reflectors can be detected.Therefore,when the intervals of the reflectors are coated with different analyte sensitive film,a new kind of SAW chemical sensor can be implemented.The outstanding merit of such a sensing system is that a chemical sensor array can be implemented with only one SAW device.

关 键 词：声表面波 化学量传感器 多反射栅 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]